Title Alternative Periodical structure of vortices in a semiconductor single wafer spin cleaner
FullText URL TransJSME_81_829_2015.pdf
Author KOUCHI, Toshinori| FUKUDA, Naoya| NAKANO, Yusuke| SHIMIZU, Yoshiya| NAGATA, Yasunori| YANASE, Shinichiro|
Keywords Rotating disk Flow stability Large-scale structure PIV LES
Published Date 2015
Publication Title Transactions of the JSME
Volume volume81
Issue issue829
Publisher 日本機械学会
Start Page 15-00273
ISSN 00290270
NCID AN00187419
Content Type Journal Article
language 日本語
OAI-PMH Set 岡山大学
Copyright Holders © 2015 The Japan Society of Mechanical Engineers
File Version author
DOI 10.1299/transjsme.15-00273
Related Url isVersionOf https://doi.org/10.1299/transjsme.15-00273