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ID 57046
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Author
Okamoto, Y. Graduate School of Natural Science & Technology, Okayama University Kaken ID publons researchmap
Okada, A. Graduate School of Natural Science & Technology, Okayama University
Kajitani, A. Graduate School of Natural Science & Technology, Okayama University
Shinonaga, T. Graduate School of Natural Science & Technology, Okayama University
Abstract
In micro machining of monocrystalline diamond by pulsed laser, unique processing characteristics appeared only under a few ten picosecond pulse duration and a certain overlap rate of laser shot. Cracks mostly propagate in parallel direction to top surface of workpiece, although the laser beam axis is perpendicular to the surface. This processed area can keep diamond structure, and its surface roughness is smaller than R-a = 0.2 mu M. New laser micro machining method to keep diamond structure and small surface roughness is proposed. This method can contribute to reduce the polishing process in micro machining of diamond. (C) 2019 Published by Elsevier Ltd on behalf of CIRP.
Keywords
Laser beam machining (LBM)
Laser micro machining
Diamond
Note
This fulltext will be available in Jul 2021
Published Date
2019-12-31
Publication Title
CIRP Annals - Manufacturing Technology
Volume
volume68
Issue
issue1
Start Page
197
End Page
200
ISSN
00078506
NCID
AA00595344
Content Type
Journal Article
language
英語
OAI-PMH Set
岡山大学
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DOI
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isVersionOf https://doi.org/10.1016/j.cirp.2019.04.119
Citation
Y. Okamoto, A. Okada, A. Kajitani, T. Shinonaga, High surface quality micro machining of monocrystalline diamond by picosecond pulsed laser, CIRP Annals, Volume 68, Issue 1, 2019, Pages 197-200, ISSN 0007-8506, https://doi.org/10.1016/j.cirp.2019.04.119.
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non-OA
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