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ID 34101
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Author
Makino, Akira
Ono, Tomohisa
Morita, Takeshi
Kurosawa, Minoru Kuribayashi
Abstract

In this paper, a micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. The cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. The transducer was made of lead zirconate titanate (PZT) bulk ceramics, and formed by micro machining, Ni plating and laser beam cutting process. Using this stator transducer, we have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and a height of 5.9 mm. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.

Keywords
Piezoelectric actuator
Ultrasonic motor
Micro motor
Bulk piezoelectric material
Micro machining
Note
Digital Object Identifier: 10.1016/j.sna.2005.10.056
Published with permission from the copyright holder. This is the institute's copy, as published in Sensors and Actuators A: Physical, February 2006, Volume 127, Issue 1, Pages 131-138. Publisher URL: http://dx.doi.org/10.1016/j.sna.2005.10.056
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Copyright © 2005 Elsevier V. B. All rights reserved.
Published Date
2006-2
Publication Title
Sensors and Actuators A: Physical
Volume
volume127
Issue
issue1
Start Page
131
End Page
138
Content Type
Journal Article
language
英語
Refereed
True
DOI
Web of Science KeyUT
Submission Path
electrical_engineering/118