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ID 56131
Title Alternative
Periodical structure of vortices in a semiconductor single wafer spin cleaner
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Author
KOUCHI, Toshinori Mechanical and System Engineering of Okayama University
FUKUDA, Naoya Mechanical and System Engineering of Okayama University
NAKANO, Yusuke Mechanical and System Engineering of Okayama University
SHIMIZU, Yoshiya Mechanical and System Engineering of Okayama University
NAGATA, Yasunori Mechanical and System Engineering of Okayama University
YANASE, Shinichiro Mechanical and System Engineering of Okayama University
Abstract
We experimentally and numerically investigated large-scale structures formed by vortices in a single wafer spin cleaner. The Q-criterion identified the vortices developed in the cleaner as the flow regions with positive second invariant of the velocity gradient tensor obtained by both the PIV and LES. The time-series two-components PIV data shows that small-vortices were clustered near and under the edge of the rotating disk and were periodically emanated from there to the housing wall of the cleaner. The emanation frequency was increased with increasing in the angular velocity of the rotating disk. Three-dimensional LES reveal that six longitudinal vortices were spirally developed from under the edge of the rotating disk to the housing wall. This structure stably rotated slower than the disk speed. Fourier analysis of the LES data agreed with that of the PIV data. This supports that the passages of the stable spiral vortices on the PIV measurement region resulted in the periodical emanation of the clustered small-vortices observed in the PIV. Such a very large-scale spiral structure will induce reattachment of contaminants on the wafer surface, and should be destructed for development of much higher efficient cleaner.
Keywords
Rotating disk
Flow stability
Large-scale structure
PIV
LES
Published Date
2015
Publication Title
Transactions of the JSME
Volume
volume81
Issue
issue829
Publisher
日本機械学会
Start Page
15-00273
ISSN
00290270
NCID
AN00187419
Content Type
Journal Article
language
日本語
OAI-PMH Set
岡山大学
Copyright Holders
© 2015 The Japan Society of Mechanical Engineers
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DOI
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isVersionOf https://doi.org/10.1299/transjsme.15-00273