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Miyagi, Daisuke Okayama University
Saitou, Aisya Okayama University
Takahashi, Norio Okayama University
Uchida, Naoki Mitsui Engineering & Shipbuilding Company Limited
Ozaki, Kazuhiro Mitsui Engineering & Shipbuilding Company, Limited
In order to process a semiconductor device of high quality, uniform heating is necessary, but it is not easy to heat uniformly with conventional induction heating equipment. To solve this problem, zone control induction heating equipment has been jointly developed. In this paper, we examine the effect of dividing an induction heater into several small coil groups having different current and frequency, using the finite-element method. We describe the heating characteristics of the zone control coil groups and show that nearly uniform heating is possible by controlling both current and frequency.
Digital Object Identifier: 10.1109/TMAG.2005.860823
Published with permission from the copyright holder. This is the institute's copy, as published in Magnetics, IEEE Transactions on, Feb. 2006, Vol. 42, Issue 2, Part 2, Pages 292-294.
Copyright © 2006 IEEE. All rights reserved.