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ID 30067
フルテキストURL
著者
Miyagi, Daisuke Okayama University
Saitou, Aisya Okayama University
Takahashi, Norio Okayama University
Uchida, Naoki Mitsui Engineering & Shipbuilding Company Limited
Ozaki, Kazuhiro Mitsui Engineering & Shipbuilding Company, Limited
抄録

In order to process a semiconductor device of high quality, uniform heating is necessary, but it is not easy to heat uniformly with conventional induction heating equipment. To solve this problem, zone control induction heating equipment has been jointly developed. In this paper, we examine the effect of dividing an induction heater into several small coil groups having different current and frequency, using the finite-element method. We describe the heating characteristics of the zone control coil groups and show that nearly uniform heating is possible by controlling both current and frequency.

キーワード
Induction heating
uniform heating
zone control
備考
Digital Object Identifier: 10.1109/TMAG.2005.860823
Published with permission from the copyright holder. This is the institute's copy, as published in Magnetics, IEEE Transactions on, Feb. 2006, Vol. 42, Issue 2, Part 2, Pages 292-294.
Publisher URL:http://dx.doi.org/10.1109/TMAG.2005.860823
Copyright © 2006 IEEE. All rights reserved.
発行日
2006-2
出版物タイトル
Magnetics
42巻
2号
開始ページ
292
終了ページ
294
資料タイプ
学術雑誌論文
言語
English
査読
有り
DOI
Submission Path
industrial_engineering/9