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ID 57046
著者
Okamoto, Y. Graduate School of Natural Science & Technology, Okayama University ORCID Kaken ID publons researchmap
Okada, A. Graduate School of Natural Science & Technology, Okayama University
Kajitani, A. Graduate School of Natural Science & Technology, Okayama University
Shinonaga, T. Graduate School of Natural Science & Technology, Okayama University
抄録
In micro machining of monocrystalline diamond by pulsed laser, unique processing characteristics appeared only under a few ten picosecond pulse duration and a certain overlap rate of laser shot. Cracks mostly propagate in parallel direction to top surface of workpiece, although the laser beam axis is perpendicular to the surface. This processed area can keep diamond structure, and its surface roughness is smaller than R-a = 0.2 mu M. New laser micro machining method to keep diamond structure and small surface roughness is proposed. This method can contribute to reduce the polishing process in micro machining of diamond. (C) 2019 Published by Elsevier Ltd on behalf of CIRP.
キーワード
Laser beam machining (LBM)
Laser micro machining
Diamond
備考
This fulltext will be available in Jul 2021
発行日
2019-12-31
出版物タイトル
CIRP Annals - Manufacturing Technology
68巻
1号
開始ページ
197
終了ページ
200
ISSN
00078506
NCID
AA00595344
資料タイプ
学術雑誌論文
言語
English
OAI-PMH Set
岡山大学
論文のバージョン
author
DOI
Web of Science KeyUT
関連URL
isVersionOf https://doi.org/10.1016/j.cirp.2019.04.119
Citation
Y. Okamoto, A. Okada, A. Kajitani, T. Shinonaga, High surface quality micro machining of monocrystalline diamond by picosecond pulsed laser, CIRP Annals, Volume 68, Issue 1, 2019, Pages 197-200, ISSN 0007-8506, https://doi.org/10.1016/j.cirp.2019.04.119.
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