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ID 33058
フルテキストURL
著者
Makino, Akira Okayama University
Oomori, Yoshitaka Okayama University
抄録

A micro ultrasonic motor using a micro-machined cylindrical bulk piezoelectric vibrator is introduced. This motor consists of the vibrator, a glass case and a rotor. The diameter of the piezoelectric vibrator is 0.8 mm and that of the motor case is 1.8 mm. Since the stator transducer is fixed at the end of the cylinder, it is easy to support the vibrator and the structure of the motor is not complicated. In addition, the vibrator and rotor are supported by the glass case. This is important for the micro ultrasonic motor because it is difficult to support the vibrator when the vibrator is miniaturized. We have fabricated and evaluated the cylindrical shaped traveling type micro ultrasonic motor using this vibrator.

キーワード
Micro motor
Ultrasonic motor
Piezoelectric
備考
Digital Object Identifier:10.1109/SENSOR.2005.1496518
Published with permission from the copyright holder. This is the institute's copy, as published in Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on, 5-9 June 2005, Volume 1, Pages 721-724.
Publisher URL:http://dx.doi.org/10.1109/SENSOR.2005.1496518
Copyright © 2005 IEEE. All rights reserved.
発行日
2005-6
出版物タイトル
Solid-State Sensors
1巻
開始ページ
721
終了ページ
724
資料タイプ
学術雑誌論文
言語
English
査読
有り
DOI
Submission Path
mechanical_engineering/9