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Makino, Akira Okayama University
Ono, Tomohisa Okayama University
Morita, Takeshi University of Tokyo
Kurosawa, Minoru Kuribayashi Tokyo Institute of Technology
In this paper, a micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. The cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. The transducer was made of lead zirconate titanate (PZT) bulk ceramics, and formed by micro machining, Ni plating and laser beam cutting process. Using this stator transducer, we have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and a height of 5.9 mm. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.
Bulk piezoelectric material
Digital Object Identifier: 10.1016/j.sna.2005.10.056
Published with permission from the copyright holder. This is the institute's copy, as published in Sensors and Actuators A: Physical, February 2006, Volume 127, Issue 1, Pages 131-138. Publisher URL: http://dx.doi.org/10.1016/j.sna.2005.10.056
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Sensors and Actuators A: Physical
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