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ID 34101
フルテキストURL
著者
Makino, Akira Okayama University
Ono, Tomohisa Okayama University
Morita, Takeshi University of Tokyo
Kurosawa, Minoru Kuribayashi Tokyo Institute of Technology
抄録

In this paper, a micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. The cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. The transducer was made of lead zirconate titanate (PZT) bulk ceramics, and formed by micro machining, Ni plating and laser beam cutting process. Using this stator transducer, we have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and a height of 5.9 mm. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.

キーワード
Piezoelectric actuator
Ultrasonic motor
Micro motor
Bulk piezoelectric material
Micro machining
備考
Digital Object Identifier: 10.1016/j.sna.2005.10.056
Published with permission from the copyright holder. This is the institute's copy, as published in Sensors and Actuators A: Physical, February 2006, Volume 127, Issue 1, Pages 131-138. Publisher URL: http://dx.doi.org/10.1016/j.sna.2005.10.056
Direct access to Thomson Web of Science record
Copyright © 2005 Elsevier V. B. All rights reserved.
発行日
2006-2
出版物タイトル
Sensors and Actuators A: Physical
127巻
1号
開始ページ
131
終了ページ
138
資料タイプ
学術雑誌論文
言語
English
査読
有り
DOI
Web of Science KeyUT
Submission Path
electrical_engineering/118